Department of Mechanical Science and Engineering (MechSE), College of Engineering, University of Illinois at Urbana-Champaign (UIUC), Urbana, Illinois, United States of America.|Department of Mechanical Science and Engineering (MechSE), College of Engineering, University of Illinois at Urbana-Champaign (UIUC), Urbana, Illinois, United States of America.|Department of Mechanical Science and Engineering (MechSE), College of Engineering, University of Illinois at Urbana-Champaign (UIUC), Urbana, Illinois, United States of America.|Department of Mechanical Science and Engineering (MechSE), College of Engineering, University of Illinois at Urbana-Champaign (UIUC), Urbana, Illinois, United States of America, Micro and Nanotechnology Laboratory (MNTL), University of Illinois at Urbana-Champaign (UIUC), Urbana, Illinois, United States of America.